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新型MEMS传感器

发布时间:2017-09-01浏览次数:512

CAIYONGMEMSJISHUYANZHIDEJIAWANQITIXINXINGCHUANGANYUANJIAN,JUYOUZIZHUZHISHICHANQUAN。YUANJIANGONGHAODI、LINGMINDUGAO、LINGMINDUWENDINGXINGHAO、SHOUMINGGAO、KANGWURANDENGYOUDIAN。HAIKEPILIANGSHENGCHAN、BINGJUYOUPILIANGXIAOZHUNDEQIANLI。DUIYUKUANGSHAN、JIAYONG、DIXIAGUANNANGDENGCHANGHEDEJIAWANQITIJIANCEJUYOUJIDADEYINGYONGQIANLI。YEKEYONGYUQITACHANGHEDETEDINGQITIDEJIANCE。

YUANJIANMIANJI<1mm2,GONGHAO<80mW,LINGMINDU>15mV;XIANGYINGSHIJIAN<30ms。